Specialty Lighting


Product Name:XERADEX Excimer ultraviolet lamps, single-ended
Product Code:1
Product description:

Product benefits 
  • No cooling required in normal operation
  • Compact design
  • Mercury-free, low energy consumption
Areas of application 
  • Removing organic residue
  • Etching plastic surfaces
  • Activating wafer surfaces
  • Setting of wetting angle
  • Removing photo resist
  • Producing ozone
  • Creating a matt surface on lacquer
  • Photocatalytic cleaning of wafers
Product features 
  • Incoherent VUV radiation at 172 nm
  • Operation with pulse-type DC current
  • High efficiency: approx. 40 %
  • Instant  operation; no startup time
  • Unlimited switching cycles
  • Instant restart with no effect on lifespan
  • Recommended service life: 2,500 h

Safety advice
XERADEX lamps produce extremely intensive UV radiation that is heavily absorbed by oxygen. Ozone is produced as a result. Adequate ventilation must be provided during their operation. The lamp should be operated only in air-tight housings.
XERADEX lamps are operated at high voltage and may only be connected to original DBD control gear. Never connect it to any other control gear.

1-XERADEX Excimer ultraviolet lamps, single-ended
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